Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340164 | Substrate processing apparatus, method of measuring temperature of substrate processing apparatus and non-transitory computer-readable recording medium | Akihito Watanabe, Naoya Miyashita, Shigeru Honda | 2019-07-02 |