Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513774 | Substrate processing apparatus and guide portion | Masato Terasaki, Naonori Akae | 2019-12-24 |
| 10513775 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Risa YAMAKOSHI, Masato Terasaki, Takashi Ozaki, Naonori Akae | 2019-12-24 |