Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522333 | Vacuum processing apparatus | Hiromichi Kawasaki, Tsutomu Iida, Hiromitsu Terauchi, Masahiro Nagatani, Yasushi Sonoda | 2019-12-31 |
| D847237 | Substrate processing unit | Hiromichi Kawasaki | 2019-04-30 |