Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290522 | Conductive interface system between vacuum chambers in a charged particle beam device | Masashi Fujita, Masahiro Tsunoda, Katsunori Onuki, Katsuya Aibara, Takaaki Nishimori | 2019-05-14 |