Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10366912 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Naruo Watanabe, Hironori Ogawa, Takanori Kato +1 more | 2019-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10366912 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Naruo Watanabe, Hironori Ogawa, Takanori Kato +1 more | 2019-07-30 |