Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386661 | Elevating mechanism | Min Xu, Zhen Wei, Qiang Zhang, Yongbo Gong, Mingming Shen | 2019-08-20 |
| 10254131 | Detection device, substrate holder and method for detecting position of substrate on substrate holder | Guodong Li, Zhen Wei, Weiwei Sun, Chenchen Jiang, Qiong Zhao | 2019-04-09 |