Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487411 | Method for synchronous electroplating filling of differential vias and electroplating device implementing same | Yun Chen, Xin Chen, Dachuang Shi, Xun Chen, Qiang Liu +1 more | 2019-11-26 |
| 10468265 | Method for synchronous wet etching processing of differential microstructures | Xin Chen, Yun Chen, Dachuang Shi, Xun Chen, Qiang Liu +1 more | 2019-11-05 |