Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197923 | Exposure device and out-of-focus and tilt error compensation method | Feibiao Chen, Chang Zhou, Yuefei Chen, Lei Diao, Jingchao Qi | 2019-02-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197923 | Exposure device and out-of-focus and tilt error compensation method | Feibiao Chen, Chang Zhou, Yuefei Chen, Lei Diao, Jingchao Qi | 2019-02-05 |