Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495535 | Differential capacitive MEMS pressure sensor and manufacturing method thereof | — | 2019-12-03 |
| 10407300 | Integrated structure of mems pressure sensor and mems inertia sensor | — | 2019-09-10 |
| 10295422 | Quasi-differential capacitive MEMS pressure sensor and manufacturing methods thereof | — | 2019-05-21 |
| 10250962 | Package structure of MEMS microphone | — | 2019-04-02 |