Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10343253 | Methods and systems for chemical mechanical planarization endpoint detection using an alternating current reference signal | Michael Wedlake | 2019-07-09 |
| 10242895 | Self-contained metrology wafer carrier systems | Stephanie Waite, William J. Fosnight, Thomas Beeg | 2019-03-26 |