Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395955 | Method and system for detecting a coolant leak in a dry process chamber wafer chuck | Lei Shi, Joselito Reyes Butiu | 2019-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395955 | Method and system for detecting a coolant leak in a dry process chamber wafer chuck | Lei Shi, Joselito Reyes Butiu | 2019-08-27 |