Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10344177 | Under layer film-forming composition for imprints and method for forming pattern | Hirotaka KITAGAWA | 2019-07-09 |
| 10248019 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film | Shohei Kataoka, Kaoru Iwato, Kana Fujii, Sou Kamimura, Keita Kato +1 more | 2019-04-02 |
| 10175576 | Curable composition for photo imprints, method for forming pattern, fine pattern, and method for manufacturing semiconductor device | Hirotaka KITAGAWA, Yuichiro Goto | 2019-01-08 |