Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10174415 | Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatus | Frank SCHNAPPENBERGER, Anke HELLMICH, Thomas DEPPISCH | 2019-01-08 |