Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483127 | Methods for high precision plasma etching of substrates | Mingmei Wang, Alok Ranjan | 2019-11-19 |
| 10211065 | Methods for high precision plasma etching of substrates | Mingmei Wang, Alok Ranjan | 2019-02-19 |