Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10436880 | Appliance and method for detecting objects in a detection region | Thomas von Wantoch, Christian Mallas, Frank Senger | 2019-10-08 |
| 10401737 | Process dose and process bias determination for beam lithography | Nezih Uenal | 2019-09-03 |