Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388492 | Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor | David Hammerich | 2019-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388492 | Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor | David Hammerich | 2019-08-20 |