Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483126 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Fumitoshi Ikegaya | 2019-11-19 |
| 10456864 | Laser processing system having function of cleaning laser optical path | — | 2019-10-29 |
| 10456869 | Laser processing device having preprocessing controller and laser processing method | Atsushi Mori, Akinori Ohyama | 2019-10-29 |
| 10363630 | Laser processing apparatus and laser processing method for performing laser processing while controlling reflected light | — | 2019-07-30 |
| 10261274 | Optical fiber connection unit having circulation path for allowing coolant to circulate | — | 2019-04-16 |