Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10343255 | Polishing apparatus | Itsuki Kobata, Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita | 2019-07-09 |
| 10256104 | Film thickness measuring method, film thickness measuring apparatus, polishing method, and polishing apparatus | — | 2019-04-09 |