Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10471481 | Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these | — | 2019-11-12 |
| 10453708 | Cleaning device and roll cleaning member | — | 2019-10-22 |
| 10395949 | Substrate drying apparatus, storage medium, and substrate drying method | — | 2019-08-27 |
| 10315232 | Cleaning member and substrate cleaning apparatus | — | 2019-06-11 |
| 10192757 | Substrate cleaning apparatus and substrate cleaning method | — | 2019-01-29 |
| 10170344 | Washing device and washing method | — | 2019-01-01 |