SY

Shoji Yoshikawa

EB Ebara: 1 patents #74 of 164Top 50%
Overall (2019): #269,344 of 560,194Top 50%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10446404 Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Ryo Tajima, Masahiro Hatakeyama, Kenichi Suematsu, Kiwamu Tsukamoto, Kenji Watanabe +2 more 2019-10-15