Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501848 | Deposition system with modular deposition heads | Lee W. Tutt | 2019-12-10 |
| 10435788 | Deposition system with repeating motion profile | Lee W. Tutt, Carolyn Rae Ellinger, Shelby F. Nelson | 2019-10-08 |
| 10422038 | Dual gas bearing substrate positioning system | — | 2019-09-24 |
| 10400332 | Deposition system with interlocking deposition heads | Lee W. Tutt | 2019-09-03 |