Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10442686 | Method for manufacturing a hollow MEMS structure | Hoa Thanh Le, Anpan Han, Karen Birkelund, Flemming JENSEN | 2019-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10442686 | Method for manufacturing a hollow MEMS structure | Hoa Thanh Le, Anpan Han, Karen Birkelund, Flemming JENSEN | 2019-10-15 |