Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520416 | Substrate treating method for a substrate treating apparatus that carries out etching treatment of substrates | Tomohiro Takahashi | 2019-12-31 |
| 10468273 | Substrate processing method | Masahiro Miyagi, Masanobu Sato | 2019-11-05 |