Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10184185 | Gas flow monitoring method and gas flow monitoring apparatus | Akiko Nakada, Minoru Ito, Masami Nishikawa, Shigeyuki Hayashi, Atsushi Ieki | 2019-01-22 |
| 10167958 | Vacuum pressure control apparatus | Masayuki Watanabe, Seiji Hashiguchi | 2019-01-01 |