Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472230 | Process for fabricating a micromechanical structure made of silicon carbide including at least one cavity | Daniel Alquier, Rami Khazaka, Jean-Francois Michaud | 2019-11-12 |