Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319565 | Method and system for controlling ion flux in an RF plasma | Bastien Bruneau, Tatiana Novikova, Jean-Paul Booth | 2019-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319565 | Method and system for controlling ion flux in an RF plasma | Bastien Bruneau, Tatiana Novikova, Jean-Paul Booth | 2019-06-11 |