Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10372032 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Horst Schneider, Thorsten Hofmann | 2019-08-06 |