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Michael Budach

CG Carl Zeiss Smt Gmbh: 1 patents #71 of 205Top 35%
Overall (2019): #346,548 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10410820 Beam blanker and method for blanking a charged particle beam Christof Baur 2019-09-10