Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10168539 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Mario Laengle, Ulrich Matejka | 2019-01-01 |