Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503075 | EUV Collector | Ingrid Schuster, Wolfgang Merkel, Georgo Metalidis | 2019-12-10 |
| 10303067 | Cooler for use in a device in a vacuum | Willi Anderl, Bernhard Weigl, Ann-Kathrin Wandner, Arno Schmittner, Markus Bauer +2 more | 2019-05-28 |