Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241421 | Vacuum system, in particular EUV lithography system, and optical element | Matthias Roos | 2019-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241421 | Vacuum system, in particular EUV lithography system, and optical element | Matthias Roos | 2019-03-26 |