Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503079 | Position detection method, position detection apparatus, lithography apparatus, and article manufacturing method | — | 2019-12-10 |
| 10314142 | Apparatus and method for detecting position, exposure apparatus, and method for the same | — | 2019-06-04 |
| 10185876 | Detection apparatus, detection method, and lithography apparatus | — | 2019-01-22 |