Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10372033 | Imprint apparatus, and method of manufacturing article | Kenji Yamamoto | 2019-08-06 |
| 10359711 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Yoshihito Tada | 2019-07-23 |