Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378100 | Sputtering apparatus and recording medium for recording control program thereof | Koji Tsunekawa, Naoki Watanabe, Motomu Kosuda | 2019-08-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378100 | Sputtering apparatus and recording medium for recording control program thereof | Koji Tsunekawa, Naoki Watanabe, Motomu Kosuda | 2019-08-13 |