Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401744 | Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article | Yoshinori Ohsaki, Osamu Morimoto, Takahiro Matsumoto | 2019-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401744 | Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article | Yoshinori Ohsaki, Osamu Morimoto, Takahiro Matsumoto | 2019-09-03 |