Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373793 | Conductive contact point pin and charged particle beam apparatus | Michihiro Kawaguchi, Kiminobu Akeno, Tomoki UMETSU | 2019-08-06 |
| 10236158 | Heat transfer plate and writing apparatus | Mitsuhiro Okazawa, Yoshiro Yamanaka | 2019-03-19 |
| 10211023 | Aperture set for multi-beam and multi-charged particle beam writing apparatus | Hiroshi Matsumoto, Hiroshi Yamashita | 2019-02-19 |