Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10372034 | Imprint apparatus, imprint method, and method for manufacturing article | Kazuhiro Sato, Tsutomu Terao | 2019-08-06 |
| 10359696 | Imprint apparatus, and method of manufacturing article | Yosuke Murakami, Tatsuya Hayashi | 2019-07-23 |
| 10216103 | Imprint method, imprint apparatus, and method of manufacturing article | — | 2019-02-26 |
| 10216104 | Imprint method, imprint apparatus, and method of manufacturing article | — | 2019-02-26 |
| 10204780 | Imprint apparatus, and article manufacturing method | — | 2019-02-12 |