Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216092 | Light source apparatus, illumination device, exposure apparatus, and device manufacturing method | — | 2019-02-26 |
HK
Haruna Kawashima
Overall (2019): #452,022 of 560,194Top 85%
1
Patents 2019