Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361059 | Magnetic field fluctuation for beam smoothing | Zhimin Wan, Donald W. Berrian | 2019-07-23 |
| 10262864 | Point-of-use enrichment of gas mixtures for semiconductor structure fabrication and systems for providing point-of-use enrichment of gas mixtures | Taiqing Qiu, Glyn Reynolds | 2019-04-16 |