Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D871608 | Gas ring for a plasma processing apparatus | Motohiro Tanaka | 2019-12-31 |
| D868995 | Gas diffusion plate for a plasma processing apparatus | Kazuumi Tanaka | 2019-12-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D871608 | Gas ring for a plasma processing apparatus | Motohiro Tanaka | 2019-12-31 |
| D868995 | Gas diffusion plate for a plasma processing apparatus | Kazuumi Tanaka | 2019-12-03 |