AH

Alfred Mike Halling

AT Axcelis Technologies: 1 patents #3 of 19Top 20%
📍 Wenham, MA: #7 of 14 inventorsTop 50%
🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%
Overall (2019): #551,078 of 560,194Top 100%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10395889 In situ beam current monitoring and control in scanned ion implantation systems 2019-08-27