Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429173 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2019-10-01 |
| 10210963 | Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber | Michael A. Purvis, Jie Ding | 2019-02-19 |