Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379443 | Radiation source device, lithographic apparatus and device manufacturing method | Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen | 2019-08-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379443 | Radiation source device, lithographic apparatus and device manufacturing method | Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen | 2019-08-13 |