Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451977 | Lithographic method and apparatus | Nico Vanroose, Johannes Jacobus Matheus Baselmans | 2019-10-22 |
| 10429749 | Method of reducing effects of reticle heating and/or cooling in a lithographic process | Mark Jan Hendrik Luttikhof | 2019-10-01 |