Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2019-03-26 |
| 10209061 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2019-02-19 |