Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483099 | Method for forming thermally stable organosilicon polymer film | — | 2019-11-19 |
| 10388513 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | — | 2019-08-20 |
| 10340135 | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride | — | 2019-07-02 |
| 10269558 | Method of forming a structure on a substrate | David Kurt de Roest | 2019-04-23 |