Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10521774 | Preventive maintenance system and preventive maintenance method | Hanako Komine | 2019-12-31 |
| 10345832 | Insulation system and substrate processing apparatus | Tsutomu Makino | 2019-07-09 |