Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480072 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2019-11-19 |
| 10468291 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2019-11-05 |
| 10370761 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2019-08-06 |
| 10276355 | Multi-zone reactor, system including the reactor, and method of using the same | Mohith Verghese, Eric James Shero, Todd Robert Dunn | 2019-04-30 |