Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10294563 | ALD of hafnium-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2019-05-21 |
| 10297444 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2019-05-21 |