Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495978 | Projection optical system, exposure apparatus, and device manufacturing method | Yasuhito Sasaki, Takeshi Nakajima | 2019-12-03 |
MS
Mitsuru Seki
Overall (2019): #338,996 of 560,194Top 65%
1
Patents 2019